 |
|
|
|
Production UEIP
Filter appointment
Not folding filter is intended for clearing of technological gases from high the disperse aerosol particles, including the gases applied in the microelectronic industry.
Parametres of filtrated gas
Pressure on a filter inlet, atm (psi) - no more than 10 (143);
Temperature, °C - from 5 to 50.
The recommended rate of flux
From 3 nm3/hrs. (50 nl/mines) to 9 nm3/hrs. (150 nl/mines).
The peak difference of pressures in direct and return directions
6 atm (86 psi).
Degree of clearing of the filter
Not less than 99,9999999 % for particles in the size more than 0,01 mcM.
Cleanliness of gas after the filter
Concentration of particles in the size more than 0,01 microns - less than 0,03 particles/litres;
Concentration of the molecular impurities (water, oxygen and others) - less than 10 ppb.
Local not tightness of cases MKF-40
No more than 1·10-3 l·hrs. a micron mercury the item/with at interior pressure of helium (10±0,5) atm. [(143±7.1) psi] and temperature
(25±10) °C.
Applied a material
Filtrating device - nickel.
The case - stainless steel, including marks 316L on request of the customer.
Processing of interior surfaces of the case
Electrochemical polishing.
Cleanliness of processing 0,63 Ra (cases from a mark steel 316L - 0,13 Ra).
The area of a filtrating surface of 40 sm-2.
Preparation for filter MKF-40 operation
The makingup, preparation for operation and trials in pure premises of a class 100.
Product packing
Two polyethylene packages, filled with stripped air or nitrogen.
Operation requirements
Air temperature - from 5 to 40°C;
Relative humidity - no more than 90 %;
Spatial orientation - any.
Reliability
Recommended periodicity of replacement or regeneration - 2 years.
The note. The gas rate of flux is specified at pressure 101,3 kPa and temperature 293,15 °K.
Parametres of gas filter MKF-40
(c) 2007-2025 Uranium, energy and industry | Copying of site materials is allowed with an active link to ueip.org
Privacy policy | Contact
